CIRCUITRY-ISOLATED MEMS ANTENNAS: DEVICES AND ENABLING TECHNOLOGY

摘要

Embodiments of a MEMS antenna are presented. Additionally, systems incorporating embodiments of a MEMS antenna are presented. Methods of manufacturing a MEMS antenna are also presented. In one embodiment, the MEMS antenna includes a substrate, a metallic layer disposed over the substrate, the metallic layer forming a ground plane, the ground plane having a region defining a gap disposed therein, a protrusion disposed over the substrate within the region defining the gap, the protrusion extending outwardly from the ground plane, the protrusion having a length and a width, the length being greater than the width, and a first electromagnetic radiator element disposed over the protrusion, the first electromagnetic element having a length and a width, the length being greater than the width.