| 摘要 |
PROBLEM TO BE SOLVED: To provide a construction method of a high purity gas supply pipe capable of easily forming a bent portion of the gas supply pipe by using a coil pipe. SOLUTION: In this construction method, a pipe line is formed by stretching waviness of the coil-shaped pipe wound in a coil shape and cutting the pipe into a required length, the bent portions are formed by bending the pipe line at a prescribed bending radius at prescribed positions, and both ends of the pipe line disposed in a pipe route are connected to prescribed portions. In the construction method, the bending is performed for pipe line by supporting each of proximity portions on an upstream side and a downstream side in portions to be the bent portions of the pipe line and pressing the portions. COPYRIGHT: (C)2011,JPO&INPIT |
