| 摘要 |
PROBLEM TO BE SOLVED: To reduce a charge trouble and to sample only an object without mixing a peripheral base material as the analyzing pretreatment of a minute insulating material sample or the like with a size of about 1μm becoming the defect cause of a device or the like. SOLUTION: A mechanism for bringing a potential controllable and conductive terminal into contact with the observation and sampling region of a sample is devised. This mechanism is composed of: the conductive terminal coming into contact with the periphery of the observation and sampling region; an operation mechanism for precisely controlling the movement of the terminal; a potential control mechanism for applying voltage to the terminal; and a mechanism for connecting the terminal to ground and the potential control mechanism. By bringing the terminal into contact with the vicinity of the sample, the charge produced in an observation and sampling process is released through a ground wire. COPYRIGHT: (C)2011,JPO&INPIT
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