发明名称 Surface Preparation of Die for Improved Bonding Strength
摘要 A surface preparation method for improved adhesion in an electronic package system. The method of improving adhesion in the electronic package system includes depositing a passivation layer on a bonding surface and roughening at least a portion of the passivation layer. A coating material is deposited on the passivation layer. The bonding surface can be part of a semiconductor or package substrate. The roughening process can be performed by a chemical or mechanical process. In another embodiment, an electronic package system includes a bonding surface of a semiconductor or package substrate. A passivation layer is deposited on the bonding surface and a portion of the passivation layer is roughened for improved adhesion. A coating material is deposited on the roughened portion of the passivation layer.
申请公布号 US2011193211(A1) 申请公布日期 2011.08.11
申请号 US20100701201 申请日期 2010.02.05
申请人 QUALCOMM INCORPORATED 发明人 CHANDRASEKARAN ARVIND;GU SHIQUN;RAY URMI
分类号 H01L23/538;H01L21/56;H01L21/60 主分类号 H01L23/538
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