Mould for lithography by UV-assisted nanoprinting and methods for manufacturing such a mould

摘要

The mold (1) has a first flexible or rigid material layer (5) with a second rigid material layer (15) in which structured areas (30) are realized, and with a third opaque and rigid material layer (2) in which recesses are formed in opposite of the areas. The recesses are filled with flexible material to form portions (4). Transmittances of the three layers with determined wavelength are defined such that transmission of luminous of the determined wavelength via the layers is less than transmission of luminous of the determined wavelength via any of the portions and the first and second layers. An independent claim is also included for a method for realizing a mold.