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发明名称
EXPOSURE APPARATUS AND EXPOSURE METHOD
摘要
申请公布号
KR20110091013(A)
申请公布日期
2011.08.10
申请号
KR20117014245
申请日期
2008.03.31
申请人
NSK LTD.
发明人
KARUISHI SHUSAKU;HAYASHI SHINICHIRO;GOTOU TADASHI;KONDOU TOSHIYUKI;MIYAJI TAKUYA;SAJI NOBUHITO;TAKAGI YOSUKE;MATSUZAKA MASAAKI
分类号
H01L21/027;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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