LOW PH MIXTURES FOR THE REMOVAL OF HIGH DENSITY IMPLANTED RESIST,申请号EP20090739904-传众专利搜索

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发明名称	LOW PH MIXTURES FOR THE REMOVAL OF HIGH DENSITY IMPLANTED RESIST
摘要
申请公布号	EP2288965(A4)	申请公布日期	2011.08.10
申请号	EP20090739904	申请日期	2009.05.01
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.	发明人	COOPER, EMANUEL;CISSELL, JULIE;ZHOU, RENJIE;KORZENSKI, MICHAEL, B.
分类号	G03F7/42;H01L21/311	主分类号	G03F7/42
代理机构		代理人
主权项
地址

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