发明名称 METHOD AND DEVICE FOR HEATING A LAYER OF A PLATE BY PRIMING AND LIGHT FLOW
摘要 <p>The invention relates to a method and to a device for at least locally heating a plate including at least one layer (2) to be at least locally heated by at least one main, light flow pulse, and including at least one priming region (4) located deeply relative to the front surface of said layer to be heated, wherein the main flow (7) is capable of heating said layer to be heated (2) while the temperature of the latter is within a high temperature range (PHT), and a priming a secondary heating means (9) capable of heating said priming region from a temperature within a low temperature range (PBT) up to a temperature within said high temperature range (PHT).</p>
申请公布号 EP2353177(A1) 申请公布日期 2011.08.10
申请号 EP20090760543 申请日期 2009.10.27
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 BRUEL, MICHEL
分类号 H01L21/268 主分类号 H01L21/268
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