| 摘要 |
A microelectronic hydrogen sensor relates to microelectronics and instrument making and meant for measuring hydrogen concentration in process media and in natural environment. The sensor comprises a piezoelectric acoustic line and input and output interdigital converters. A hydrogen-sensitive layer is deposited to acoustic line surface between interdigital converters; a second hydrogen-sensitive layer is deposited above the first layer. The upper layer id made of tetra ethylene glycol dimethacrylate, the lower layer – of acrylnitrile-butadiene co-polymer. The sensors provide increase of optionality and sensitivity with hydrogen control and construction simplification. |
