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发明名称
摘要
申请公布号	JP4746161(B2)	申请公布日期	2011.08.10
申请号	JP19980508367	申请日期	1997.07.02
申请人		发明人
分类号	H01L21/316;H01L27/04;H01L21/02;H01L21/3205;H01L21/822;H01L27/115;H01L41/09	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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