发明名称 MEMS-BASED CAPACITIVE SENSOR FOR USE IN A SEISMIC ACQUISITION SYSTEM
摘要 An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.
申请公布号 EP2353034(A2) 申请公布日期 2011.08.10
申请号 EP20090825490 申请日期 2009.11.06
申请人 GECO TECHNOLOGY B.V. 发明人 PAULSON, HANS
分类号 G01V1/16;G01P15/125;G01P15/13 主分类号 G01V1/16
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