METHOD OF THREE DIMENSIONS IMPRINT LITHOGRAPHY

摘要

PURPOSE: A method of three-dimensional imprint lithography is provided to become compatible with existing equipments by using means for conventional imprint lithography including pressurization, heating or ultraviolet irradiation. CONSTITUTION: A stamp(10) includes a first stamp(11), a second stamp(12) ..., a N-1 stamp, and a N stamp to the top and the bottom direction, which at least more than one are overlapped on a substrate(30) each other. The N-1 stamp is composed of a material with greater hardness or intensity than the N stamp and is thicker than the N stamp and the cross section of a N-1 stamp pattern is bigger than that of the N stamp. A plurality of stamps is successively touched with the substrate at a constant time interval.