发明名称 Structure and method for thin film device with stranded conductor
摘要 Provided is a thin film device and an associated method of making a thin film device. For example, fabrication of an inverter thin film device is described. Moreover, a parallel spaced electrically conductive strips are provided upon a substrate. A functional material is deposited upon the conductive strips. A 3D structure is then provided upon the functional material, the 3D structure having a plurality of different heights, at least one height defining a first portion of the conductive strips to be bundled. The 3D structure and functional material are then etched to define a TFD disposed above the first portion of the conductive strips. The first portion of the conductive strips is bundled adjacent to the TFD.
申请公布号 US7994509(B2) 申请公布日期 2011.08.09
申请号 US20050264321 申请日期 2005.11.01
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. 发明人 MEI PING;LUO HAO;TAUSSIG CARL
分类号 H01L29/10 主分类号 H01L29/10
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