发明名称 |
Metal-gated MOSFET devices having scaled gate stack thickness including gettering species in a buried oxide |
摘要 |
Metal-oxide semiconductor field effect transistor (MOSFET) devices having metal gate stacks and techniques for improving performance thereof are provided. In one aspect, a metal-oxide semiconductor device is provided comprising a substrate having a buried oxide layer at least a portion of which is configured to serve as a primary background oxygen getterer of the device; and a gate stack separated from the substrate by an interfacial oxide layer. The gate stack comprises a high-K layer over the interfacial oxide layer; and a metal gate layer over the high-K layer.
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申请公布号 |
US7993995(B2) |
申请公布日期 |
2011.08.09 |
申请号 |
US20100652428 |
申请日期 |
2010.01.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MAJUMDAR AMLAN;MO RENEE TONG;REN ZHIBIN;SLEIGHT JEFFREY |
分类号 |
H01L21/336;H01L21/8234;H01L21/8238 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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