WAFER TRANSFER WITH DETECTING WAFER WARPAGE AND CONTROL METHOD THEREOF

摘要

PURPOSE: A wafer transfer device including a wafer bending detecting means and a controlling method thereof are provided to use a wafer bending detecting means like a micro camera before picking up the wafer by tweezers in a shipping box, thereby preventing picking up bent wafers by the tweezers. CONSTITUTION: A wafer bending detecting means detects a wafer(100) bending. A control part(420) controls tweezers operation in order to not transfer a bent wafer to process equipment(900) by operating image data acquired from the wafer bending detecting means. A wafer transfer device includes the wafer bending detecting means and the control part. The wafer bending detecting means is a micro camera(500) installed in the end of tweezers(200) in order to achieve an image by scanning the wafer aligned up and down in a shipping box(10).