| 发明名称 |
Fabrication of transducer structures |
| 摘要 |
Methods for fabricating structures such as transducer pedestal structures and transducers fabricated by the methods.
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| 申请公布号 |
US7994463(B1) |
申请公布日期 |
2011.08.09 |
| 申请号 |
US20100704116 |
申请日期 |
2010.02.11 |
| 申请人 |
CORPORATION FOR NATIONAL RESEARCH INITIATIVES;SCIENCE RESEARCH LABORATORY |
发明人 |
FLUSBERG ALLEN M.;HUFF MICHAEL A. |
| 分类号 |
H01L27/00 |
主分类号 |
H01L27/00 |
| 代理机构 |
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代理人 |
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