发明名称 APPARATUS FOR THIN LAYER DEPOSITION, METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD
摘要 PURPOSE: A thin-film deposition device, a method of manufacturing an organic light-emitting display device using the same and an organic light-emitting display device are provided to enable easy manufacturing and be easily applied to mass-produce large substrates. CONSTITUTION: A thin-film deposition device comprises a deposition source(110), a nozzle unit, a patterning slit sheet and a blocking-plate assembly. The deposition source releases a deposition material. The nozzle unit is arranged on one side of the deposition source and a plurality of nozzles are formed in a first direction. The pattering slit sheet is arranged to face the nozzle unit, a common deposition area is formed on one side of the patterning slit sheet and patterning slits are formed on the other side of the patterning slit sheet. The blocking-plate assembly is arranged between the nozzle unit and the patterning slit sheet in the first direction.
申请公布号 KR20110089663(A) 申请公布日期 2011.08.09
申请号 KR20100009160 申请日期 2010.02.01
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 KIM, JUNG YEON;SUNG, UN CHEOL
分类号 C23C14/24;H01L51/56 主分类号 C23C14/24
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