发明名称 |
APPARATUS FOR THIN LAYER DEPOSITION, METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD |
摘要 |
PURPOSE: A thin-film deposition device, a method of manufacturing an organic light-emitting display device using the same and an organic light-emitting display device are provided to enable easy manufacturing and be easily applied to mass-produce large substrates. CONSTITUTION: A thin-film deposition device comprises a deposition source(110), a nozzle unit, a patterning slit sheet and a blocking-plate assembly. The deposition source releases a deposition material. The nozzle unit is arranged on one side of the deposition source and a plurality of nozzles are formed in a first direction. The pattering slit sheet is arranged to face the nozzle unit, a common deposition area is formed on one side of the patterning slit sheet and patterning slits are formed on the other side of the patterning slit sheet. The blocking-plate assembly is arranged between the nozzle unit and the patterning slit sheet in the first direction. |
申请公布号 |
KR20110089663(A) |
申请公布日期 |
2011.08.09 |
申请号 |
KR20100009160 |
申请日期 |
2010.02.01 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
KIM, JUNG YEON;SUNG, UN CHEOL |
分类号 |
C23C14/24;H01L51/56 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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