发明名称 WIRE SAW APPARATUS
摘要 PURPOSE: A wire saw apparatus is provided to be comprised of an upper stage made of building stone or mineral casting and support an ingot table, drum unit, and various motors, thereby improving operating accuracy by reducing vibration. CONSTITUTION: A wire saw apparatus is comprised of a lower stage(30), an upper stage(100), and a frame. The upper stage is placed on the lower stage. The frame is placed on the supper stage in order to support an ingot table(38) and a drum unit(40) of a wire. The ingot table moves an ingot. The upper stage is made of building stone or mineral casting. A part of whole of the frame is comprised of the mineral casting or building stone.
申请公布号 KR20110089690(A) 申请公布日期 2011.08.09
申请号 KR20100009196 申请日期 2010.02.01
申请人 JUNG, KEUN SUP 发明人 JUNG, KEUN SUP;LEE, JOO IL
分类号 H01L21/301;B26D1/553 主分类号 H01L21/301
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