INTERLAYER WIRING OF MICRO-ELECTRO MECHANICAL DEVICE USING CARBON NANOTUBE

摘要

PURPOSE: An inter-layer wiring formation method of a micro electro mechanical device using a carbon nanotube is provided to reduce processing cost by simplifying a wiring formation process, thereby enabling to perform more precise patterning than a wiring formation method using a shadow mask. CONSTITUTION: A carbon nanotube solution is manufacture by dispersing a carbon nanotube into a solvent. A conductive wiring is formed between a lower electrode pad(110) and upper electrode pad(120) by jet printing the carbon nanotube solution. The printed conductive wiring between the lower electrode pad and upper electrode pad is dried.