| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To automatically and accurately set an inspection window. <P>SOLUTION: An appearance inspection apparatus 10 inspects an inspection object 12 using an inspection object image obtained, by imaging the inspection object 12 with a substrate and components mounted to the substrate. The appearance inspection apparatus 10 includes a projection unit 26 for projecting a pattern to the inspection object 12; a height measurement section 32 for generating height information on a surface of the inspection object 12, based on a pattern image of the inspection object 12, to which the pattern is projected; an inspection data processing section 34 for setting the inspection window in the inspection object image, based on a layout of the components on the inspection object image identified by using the height information. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
