| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas dehumidifier capable of performing dehumidification while suppressing gas consumption. <P>SOLUTION: The gas dehumidifier 1 that dehumidifies a specific gas supplied to a predetermined apparatus includes a first dehumidifier 10A that dehumidifies the specific gas flowing in a circulating route with a moisture absorption material and a second dehumidifier 10B that dehumidifies a regenerated exhaust gas of the first dehumidifier 10A discharged by heating to regenerate the moisture absorption material and supplies the same to a circulating route provided in the circulating route where the specific gas supplied to the predetermined apparatus is circulated. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
