SCANNING TYPE CHARGED PARTICLE MICROSCOPE DEVICE AND METHOD FOR PROCESSING IMAGE ACQUIRED WITH SCANNING TYPE CHARGED PARTICLE MICROSCOPE DEVICE

摘要

The present method comprises the steps of imaging the sample under different imaging conditions to acquire multiple images, generating degradation functions for the multiple acquired images, and then generating an image with an improved resolution using the multiple acquired images and the degradation functions corresponding to the acquired images to process the image with the improved resolution.