| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-precision hydrostatic bearing device, capable of preventing vibration by constituting an orifice, a ventilation groove or the like so that a laminar flow state can be maintained in the overall area of a ventilation passage of pressurized gas, and a stage provided with the hydrostatic bearing device. SOLUTION: In the hydrostatic bearing device, a structure such as shapes of the orifice 14, the ventilation groove 11 and an exhaust groove 12 is designed so that the laminar flow state can be maintained in the overall area of the ventilation passage of pressurized gas. A width-directional sectional shape of the ventilation groove 11 forms a curved line protruding in the direction away from a sliding surface 10a. The ventilation groove 11 includes an annular groove 11b formed in an annular shape to surround the orifice 14 and a plurality of distribution grooves 11a radially extended toward the annular groove 11b from the orifice 14 as the center to allow the annular groove 11a to communicate with the orifice 14, and is formed so as to be symmetric in a moving direction of a moving body. COPYRIGHT: (C)2011,JPO&INPIT
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