发明名称 METHOD FOR RAPID DEPOSITION OF A COATING ON A SUBSTRATE
摘要 A process of depositing a coating on a substrate, the method comprising the steps of: (a) depositing material on a substrate by performing a cathodic Vacuum arc (CVA) deposition step; and (b) depositing material on a substrate by performing at least one of a chemical vapour deposition (CVD) step and a physical Vapour deposition (PVD) step that excludes CVA deposition, Wherein the thickness of the material deposited in step (b) is greater than the thickness of the material deposited in step (a).
申请公布号 US2011186420(A1) 申请公布日期 2011.08.04
申请号 US20090993354 申请日期 2009.06.09
申请人 NANOFILM TECHNOLOGIES INTERNATIONAL PTE LTD 发明人 SHI XU
分类号 C23C28/00 主分类号 C23C28/00
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