ION MILLING DEVICE, SAMPLE PROCESSING METHOD, PROCESSING DEVICE, AND SAMPLE DRIVE MECHANISM

摘要

A technique for processing which does not depend on the material or the angle of incidence of an ion beam is provided. A processing device for processing a sample by directing an ion beam onto the sample, wherein a sample rotating/tilting mechanism for rotating and tilting the sample with respect to the ion beam is provided, the sample rotating/tilting mechanism is provided with a rotation shaft which rotates the sample with respect to the ion beam and is also provided with a tilt shaft which is orthogonal to the rotation shaft and tilts the sample with respect to the ion beam, and rotation and tilting of the sample are performed simultaneously.