MONOLITHIC SILICON ACOUSTO-OPTIC MODULATOR STRUCTURE AND METHOD

摘要

An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of connected disks located separated over a substrate and anchored at one end to the substrate at an anchor point. An actuator electrode is located separated from a first one of the connected disks (i.e., that is typically closer to the anchor point) and an optical waveguide is located separated from a second one of the connected disks (i.e., that is typically further from the anchor point). Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first disk that is mechanically coupled to the second disk which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third disk as a radiation pressure driven detector disk connected to the first disk, but not the second disk. Further contemplated is a related fabrication method and a related operation method.