OBSERVATION METHOD AND OBSERVATION DEVICE

摘要

Provided is a charged-particle radiation device wherein a focal-point step size used in autofocusing is optimized with respect to the spread of an approximation curve for a focal-point measure distribution. Said step size is corrected using image feature quantities obtained from a layout image which is obtained from design data or an image taken at a first magnification. Autofocusing is performed using the obtained step size, and an observation/measurement/inspection sample is then imaged.