CERAMIC JOINED BODY AND METHOD FOR PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a thin ceramic joined body in which a conductor is embedded with high accuracy.

SOLUTION: The method for production of a thin ceramic joined body includes: a process of preparing the first and second ceramic sintered compacts 11 and 12 having the relative density of≥99% and a conductor 13 having voids; and a process of infilling voids by holding the conductor 13 between the first and second ceramic sintered compacts 11 and 12 to hot-press them, and making creep at least one ceramic sintered compact to join to the other ceramic sintered compact. The first and second ceramic sintered compacts 11 and 12 have a mutually common ingredient as a main component, and the average particle size of at least either one of the compacts is 7μm or less.

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