| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrying method and a wafer carrying device capable of performing work of supplying and separating a plurality of wafers more efficiently. SOLUTION: The wafer carrying device A includes a supporting means 2 supporting a wafer group Wf, a sending-out means 4 for sending out at least the uppermost-positioned wafer Wf1 of the wafer group Wf supported by the supporting means 2, and a holding means 3 having a holding member 33 which can hold the wafer group Wf and capable of switching the state between a first state that the distance between the holding member 33 and the supporting means 2 is relatively increased and a second state that the distance between the holding member 33 and the supporting means 2 is relatively decreased. When the holding means 3 is in the first state, the wafer group Wf can be supplied to the holding member 33 and when the holding means 3 is in the second state, the wafer group Wf can be moved from the holding member 33 to the supporting means 2. COPYRIGHT: (C)2011,JPO&INPIT
|
