| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for joining a main substrate with a nano-size structure having recesses and projections formed and a lid substrate together without damaging the structure having the recesses and projections, and to provide a method for manufacturing a micro fluid device having a nano flow channel using the joining method. SOLUTION: After a silicone rubber layer 18 is formed by coating a joining surface of the lid substrate 16 with a silicone rubber composition 17 and curing the composition 17, the surface of the main substrate 10 having the formed recessed and projected formations 12, 14 and the silicone rubber layer 18 of the lid substrate 16 are brought into close contact to each other. While the projected formation 14 of the main substrate is covered with the silicone rubber layer 18, the projected formation 12 is not filled up with the silicone rubber layer 18. While the close contact condition is maintained, ultraviolet irradiation is carried out from the main substrate 10 side, thereby a silicon oxide film is formed on the joining interface to firmly fix both substrates. COPYRIGHT: (C)2011,JPO&INPIT
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