发明名称 |
INDUCTOR FORMED ON A SEMICONDUCTOR SUBSTRATE |
摘要 |
An inductor formed on a semiconductor substrate, comprising a coil formed with at least a single metal layer having a plurality of slots and an insulator layer filled in the plurality of slots, wherein the insulator layer is encompassed in the single metal layer and the insulator layer does not cover the top surface of the single metal layer.
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申请公布号 |
US2011187487(A1) |
申请公布日期 |
2011.08.04 |
申请号 |
US201113086500 |
申请日期 |
2011.04.14 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
HSU TSUN-LAI;OU JUN-HONG;CHEN JUI-FANG;HSU JI-WEI |
分类号 |
H01F5/00 |
主分类号 |
H01F5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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