<p>The same part on a sample to be tested is scanned a plurality of times, and an optical condition at the time of a primary charged particle beam scanning or an image generation condition at the time of generating an image from an image signal to be output is adjusted to be such a condition that at least two kinds of electrical defects can be captured, thereby testing the electrical defects of the sample to be tested. Thus, it is possible to attain a charged particle radiation device or a test method with the use of a charged particle radiation for performing a test under such a condition that the at least two kinds of electrical defects can be captured in one test with a higher probability than ever before.</p>
