发明名称 METHOD TO MAINTAIN THIN FILM AND MANUFACURE USING THE SAME
摘要 PURPOSE: A membrane maintaining method and a substrate product using the same are provided to stably maintain a membrane which is volatilized or exfoliated when exposed to the air, thereby improving the quality of a substrate product. CONSTITUTION: A main membrane with volatility is provided on a substrate(S3). A protection membrane which seals the main membrane is provided in order to prevent volatilization of the main membrane. An auxiliary membrane is provided in order to block the exposure of a side surface in the main membrane(S2). A cover membrane is provided in the upper part of the main membrane in order to protect the upper part(S4).
申请公布号 KR20110088833(A) 申请公布日期 2011.08.04
申请号 KR20100008532 申请日期 2010.01.29
申请人 KOREA ATOMIC ENERGY RESEARCH INSTITUTE 发明人 HA, JANG HO;KANG, SANG MOOK;PARK, SE HWAN;KIM, HAN SOO
分类号 H01L21/20 主分类号 H01L21/20
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