发明名称 DOUBLE-SIDED IMPRINT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a double-sided imprint apparatus capable of simultaneously imprinting both sides of a transfer receiving body such as a doughnut shaped disk substrate. SOLUTION: The double-sided imprint apparatus has at least a pattern transfer mechanism including an upper surface side stamper device supported by an elevation mechanism, and a lower side stamper device and a transfer printing target separator, which are fixed on a transport table placed on a guide rail. The transport table can reciprocate on the guide rail by a transport drive mechanism, thereby the upper surface side stamper device defines a center position, and the lower side stamper device and the transfer printing target separator can be alternately moved to a location where the lower side stamper device and the transfer receiving body release device face the upper surface side stamper device. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011150780(A) 申请公布日期 2011.08.04
申请号 JP20100287429 申请日期 2010.12.24
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SHIZAWA NORITAKE;MORI KYOICHI;TARUMITSU TAKASHI;SHIRAISHI TOSHIMITSU
分类号 G11B5/84;B29C59/02;B29L17/00;H01L21/027 主分类号 G11B5/84
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