| 摘要 |
The present invention relates to an apparatus for detecting particles on a flat glass, which detects particles adhered to the flat glass having both sides such as a surface A and a surface B, comprising: a surface A laser light irradiating device for irradiating laser light of a first wavelength polarized in a direction S at a first angle based on a surface A normal vector toward the surface A in an upper part of the surface A of the flat glass; a surface A photographing device for taking a picture of a point where the laser light irradiated by the surface A laser light irradiating device is irradiated on the surface A of the flat glass; a surface B laser light irradiating device for irradiating laser light of a second wavelength toward the surface A at a second angle smaller than the first angle based on the surface A normal vector in the upper part of the surface A of the flat glass, and wherein the irradiated laser light is mostly transmitted in thickness direction of the flat glass; a surface B photographing device for taking a picture of a point where the laser light irradiated by the surface B laser light irradiating device is irradiated on the surface B of the flat glass; and a detection signal processor for analyzing video images inputted from the surface A photographing device and the surface B photographing device, and deciding from which photographing device the particles are more clearly outputted, to decide on a surface to which the particles adhere.
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