发明名称 |
SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device in which the manufacturing cost thereof is reduced and a short channel effect of a field effect transistor is suppressed. SOLUTION: The semiconductor device includes: a well region of a second conductivity type, the well region having a source region of a first conductivity type and a drain region of the first conductivity type that are selectively formed in a surface thereof; a control electrode to control a current path between the source region and the drain region; a first main electrode connected to the source region; and a second main electrode connected to the drain region. In a case where a position of the well region at an identical depth to a portion of the source region or the drain region with a maximum curvature is defined as the reference, a profile of an impurity concentration distribution of the second conductivity type in the depth direction of the well region has a peak of the impurity concentration distribution in a range of ±0.15 μm from the reference. COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011151120(A) |
申请公布日期 |
2011.08.04 |
申请号 |
JP20100010063 |
申请日期 |
2010.01.20 |
申请人 |
TOSHIBA CORP |
发明人 |
TAKEBUCHI MASATAKA;UTSUNOMIYA KAZUHIRO;IKEDA NORIYASU |
分类号 |
H01L29/78;H01L21/8238;H01L27/092 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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