METHOD FOR MANUFATURING CAPACITOR WITH PILLAR TYPE STORAGENODE

摘要

PURPOSE: A manufacturing method of a capacitor equipped with a charge storage electrode of pillar type is provided to prevent seam by gap-filling through 2 times using different conductive layers when the charge storage electrode of pillar type are formed. CONSTITUTION: An insulating layer having open area in the top of a substrate(21) is formed. A first conductive layer(27) is formed on the insulating layer. A second conductive layer(28) gap-filling the open area is formed on the first conductive layer. A charge storage electrode of pillar type is formed by selectively eliminating the first conductive layer and the second conductive layer. The insulating layer is eliminated.