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发明名称
摘要
申请公布号
KR101053989(B1)
申请公布日期
2011.08.04
申请号
KR20080129204
申请日期
2008.12.18
申请人
发明人
分类号
H01L21/8247;H01L27/115
主分类号
H01L21/8247
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