| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary vacuum pump which reduces an impact transmitted to a device subjected to evacuation. SOLUTION: By the use of a special washer formed with a bush part 17a to be inserted into a bolt hole 14, a gap G is formed between a shaft of a bolt 15 and the bolt hole 14. Then, the bolt 15 is deformed at the part of the area H2 when impact torque acts on an intake port flange 13a, and the impact is absorbed by strain energy accompanying the deformation of the bolt to suppress the transmission of the impact to a flange 16 on the device side. COPYRIGHT: (C)2011,JPO&INPIT
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