| 摘要 |
In order to form carbon nanotubes on a conductor covering a portion of a substrate in a short heating time, a mesh-like conductive member (102) made of Mo or the like is deposited on a substrate (101) made of glass or the like; a catalyst support, such as Al2O3, and a catalyst, such as Fe or Co, are formed on the conductive member; and the substrate (101) is placed in a carbon-source gas atmosphere and heated for only a short time by exposing the conductive member (102) to voltage or microwaves. As a result, thin carbon nanotubes (104) grow from the conductive member (102) through a catalyst support (503) and a catalyst (504). The carbon nanotubes (104) function as an emitter of a planar light-emitting device (11) and the conductive member (102) functions as a cathode.
|
