| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for surface inspection, capable of reliably meeting miniaturization of pitch repeatedly, even without turning illumination light into short-wavelength light. SOLUTION: This invented surface inspection device includes a light source to emit divergent pencil of rays of linear polarization for illuminating substrate to be inspected, an optical member to enter the divergent pencil of rays of linear polarization so that the principal ray of this divergent pencil of rays may have a prescribed incidence angle and lead it to the substrate to be inspected, a light receiver to receive a linear polarization with its polarization direction perpendicular to that of the linear polarization among any luminous flux from the substrate to be inspected, and at least one polarization correction member arranged in an optical path between the light source and the light receiver to eliminate any disturbance of polarization plane caused by the optical member, conducting surface inspection of the substrate to be inspected based on the light received in the light receiver. COPYRIGHT: (C)2011,JPO&INPIT
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