| 摘要 |
PROBLEM TO BE SOLVED: To evaluate the surface contamination state of a substrate by a simple technique. SOLUTION: In measuring the surface resistivity of a substrate 1 to be evaluated, humidity at least in the vicinity of a measuring point is continuously or intermittently changed to perform measurement, and the surface contamination state of the substrate 1 to be evaluated is evaluated on the basis of the change state of the surface resistivity accompanied by the humidity change. This measuring instrument is equipped with a measuring instrument body 2 for measuring the surface resistivity by bringing an electrode 2a into contact with the surface of the substrate 1, a humidity variable chamber 3 capable of bringing the electrode into contact with the surface of the substrate in a state that the measuring instrument body is internally housed and a measuring air supply mechanism 4 for supplying measuring air to the humidity variable chamber, and a humidity variable mechanism 4a for adjusting the humidity of measuring air is provided at the measuring air supply mechanism. COPYRIGHT: (C)2011,JPO&INPIT
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