| 摘要 |
PROBLEM TO BE SOLVED: To obtain a vibration absorption/suppression device of a motor drive fan of an FFU (Fan Filter Unit) capable of securing performance of a measurement device of a semi-conductor circuit pattern. SOLUTION: A ring-shaped multi-layer metal plate, where the rigidity is reduced by accumulating thin ring-shaped metal plates in multiple layers, is installed at a position surrounding the motor drive fan on an FFU casing in a ring-shaped manner. Vibration energy transmitted from the motor drive fan to the FFU casing is consumed as thermal energy, and the vibration is absorbed and suppressed. A Q value of natural vibration is lowered by adopting the multi-layer metal plate for the FFU, which hardly causes resonance and increases weight of a motor drive fan mounting part. The vibration is suppressed, and propagation of vibration to the FFU casing is reduced. COPYRIGHT: (C)2011,JPO&INPIT
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