发明名称 MANUFACTURING METHOD FOR SOLAR CELL
摘要 A manufacturing method for a solar cell including an upper electrode extracting an electrode at an incident light side, the upper electrode including a transparent conductive film, a basic structural element of the transparent conductive film being any one of an indium (In), a zinc (Zn), and tin (Sn), the manufacturing method including: a step A forming a texture on a front surface of a transparent substrate using a wet etching method, the transparent conductive film being formed on the transparent substrate, wherein in the step A, when the texture is formed, a metal thin film is formed on the transparent substrate, and an anisotropic etching is performed with the metal thin film being a mask.
申请公布号 US2011189817(A1) 申请公布日期 2011.08.04
申请号 US200913124529 申请日期 2009.10.15
申请人 ULVAC, INC. 发明人 TAKAHASHI HIROHISA;ISHIBASHI SATORU;NAKAMURA KYUZO
分类号 H01L31/18 主分类号 H01L31/18
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