摘要 |
A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow. |
申请人 |
PIVOTAL SYSTEMS CORPORATION;MONKOWSKI, ADAM, J.;CHALMERS, JAMES, MACALLEN;CHEN, JIALING;DING, TAO;MONKOWSKI, JOSEPH, R. |
发明人 |
MONKOWSKI, ADAM, J.;CHALMERS, JAMES, MACALLEN;CHEN, JIALING;DING, TAO;MONKOWSKI, JOSEPH, R. |