| 摘要 |
<p>Disclosed is an apparatus for forming an image for pattern matching, which forms a template on the basis of design data, without performing exposure simulation and the like, and which can form the image that corresponds to the size of an actual pattern. In order to form the image for matching, the design data is reduced or enlarged on the basis of a target pattern size, and the image for matching is formed on the basis of the reduced or enlarged pattern.</p> |
