发明名称 ROLL-TO-ROLL IMPRINT LITHOGRAPHY AND PURGING SYSTEM
摘要 <p>Droplets of polymerizable material may be patterned on a film sheet using a roll-to-roll system. The droplets of polymerizable material may be dispensed on the film sheet such that a substantially continuous patterned layer may be formed on the film sheet. A contact system provides for smooth fluid front progression the polymerizable material during imprinting. A gas purging system may be positioned during imprinting. Gas purging systems may provide for purging in parallel as fluid front of polymerizable material moves through roll-to- roll system.</p>
申请公布号 WO2011094014(A1) 申请公布日期 2011.08.04
申请号 WO2011US00160 申请日期 2011.01.28
申请人 MOLECULAR IMPRINTS, INC. 发明人 CHOI, BYUNG-JIN
分类号 G03F7/00;B29C43/00 主分类号 G03F7/00
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