发明名称 MANUFACTURING APPARATUS AND METHOD FOR OPTICAL WAVEGUIDE STRUCTURE
摘要 <p><P>PROBLEM TO BE SOLVED: To accurately allocate a clad film on a clad structure composing an optical waveguide structure. <P>SOLUTION: The manufacturing apparatus 500 includes: a shape retaining rack 151 on which a clad film 6 is held; a microscope 505 which confirms the position of the clad film 6 on the shape retaining rack 151; a first position adjusting mechanism 152 that adjusts the position of the shape retaining rack 151 while checking the position of the clad film 6 with the microscope 505; and a pressing head 21 which presses the clad film 6 transferred from the shape retaining rack 151 onto a clad structure 1. The manufacturing apparatus 500 further includes a third stage 100 which holds the clad structure 1 and can face the microscope 505 and the pressing head 21. The manufacturing apparatus 500 further includes a second position adjusting mechanism 101 which adjusts the position of the third stage 100 while checking the position of the clad structure 1 with the microscope 505. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011150106(A) 申请公布日期 2011.08.04
申请号 JP20100010700 申请日期 2010.01.21
申请人 FUJITSU LTD 发明人 IKURA KAZUYUKI
分类号 G02B6/13;G02B6/122;G02B6/42 主分类号 G02B6/13
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