| 摘要 |
PROBLEM TO BE SOLVED: To provide a leakage check method suitable for an in-line type vacuum processor, capable of reducing a maintenance cost and specify a leakage position. SOLUTION: The leakage check method is preferably suitably applied to the in-line type vacuum processor S in which a plurality of chambers are connected respectively through gate valves. After an introduction S004 of gas that a prescribed amount of gas is introduced to the chamber P7 connected adjacently to the chamber P6 in which a leakage check is carried out, a degree of vacuum of the chamber P6 and the chamber P7 is measured S005. A result obtained by comparing S007 the degree of vacuum of the chamber P6 with a reference value is output S008. Then, to the chambers connected to a side of the chamber P6 reverse to the chamber P7, the leakage check is sequentially carried out. COPYRIGHT: (C)2011,JPO&INPIT
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