发明名称 METHOD FOR ANALYSIS OF SOLID SAMPLE
摘要 PROBLEM TO BE SOLVED: To provide a method for analysis of low concentration hydrogen in solid samples correctly using a secondary ion mass spectrometry. SOLUTION: The hydrogen isotope of mass number 2, physical behavior of which resembles closely with that of hydrogen isotope of mass number 1, of very little abundance in the atmosphere as an elemental substances or a compound is introduced into a solid sample or an analytical object through ion injection. Then, the solid samples are heat-treated, resulted in reduction of concentration of hydrogen isotope of mass number 1 and mass number 2 contained in the solid samples, concentration of hydrogen isotope of mass number 2 is analyzed, based on a secondary ion mass spectrometry, and finally the number which remains in the solid samples is identified as a concentration of hydrogen isotope of mass number 1. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011149933(A) 申请公布日期 2011.08.04
申请号 JP20100287771 申请日期 2010.12.24
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 OHARA HIROKI;SAKATA JUNICHIRO
分类号 G01N23/225;G01N27/62 主分类号 G01N23/225
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